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无机材料学报
Si(100)衬底上PLD法制备高取向度AlN薄膜
张霞,陈同来,李效民
Highly-oriented A1N Thin Films on Si(100) Substrates by Pulsed Laser Deposition
ZHANG Xia,CHEN Tong-Lai,LI Xiao-Min
无机材料学报 . 2005, (2): 419 -424 .