工艺条件对热丝 CVD金刚石薄膜电学性能的影响
刘健敏,夏义本,王林军,张明龙,苏青峰
Effects of Process Conditions on Electric Properties of Hot-filament CVD Diamond Films
LIU Jian-Min,XIA Yi-Ben,WANG Lin-Jun,ZHANG Ming-Long,SU Qing-Feng
无机材料学报
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2006, (4): 1018
-1024
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DOI: 2006 DOI: 10.3724/SP.J.1077.2006.01018
