空腔型薄膜体声波滤波器的关键技术进展
陶桂龙, 支国伟, 罗添友, 欧阳佩东, 衣新燕, 李国强
Progress on Key Technologies of Cavity-structured Thin Film Bulk Acoustic Wave Filter
TAO Guilong, ZHI Guowei, LUO Tianyou, OUYANG Peidong, YI Xinyan, LI Guoqiang
无机材料学报
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2025, (2): 128
-144
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DOI: 10.15541/jim20240355
