氮空位调控晶格畸变度强化(NbMoTaW)Nx薄膜的力学性质和耐磨损性
张睿, 张侃, 袁梦雅, 谷鑫磊, 郑伟涛
Nitrogen Vacancy Regulated Lattice Distortion on Improvement of (NbMoTaW)Nx Thin Films: Mechanical Properties and Wear Resistance
ZHANG Rui, ZHANG Kan, YUAN Mengya, GU Xinlei, ZHENG Weitao
无机材料学报
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2024, (6): 715
-725
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DOI: 10.15541/jim20230564
