等离子体增强原子层沉积AlN外延单晶GaN研究
卢灏, 许晟瑞, 黄永, 陈兴, 徐爽, 刘旭, 王心颢, 高源, 张雅超, 段小玲, 张进成, 郝跃
Epitaxy Single Crystal GaN on AlN Prepared by Plasma-enhanced Atomic Layer Deposition
LU Hao, XU Shengrui, HUANG Yong, CHEN Xing, XU Shuang, LIU Xu, WANG Xinhao, GAO Yuan, ZHANG Yachao, DUAN Xiaoling, ZHANG Jincheng, HAO Yue
无机材料学报
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2024, (5): 547
-553
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DOI: 10.15541/jim20230490
