2英寸MPCVD光学级均匀金刚石膜的制备研究
产思义, 屠菊萍, 黄珂, 邵思武, 杨志亮, 刘鹏, 刘金龙, 陈良贤, 魏俊俊, 安康, 郑宇亭, 李成明
Uniform Growth of Two-inch MPCVD Optical Grade Diamond Film
CHAN Siyi, TU Juping, HUANG Ke, SHAO Siwu, YANG Zhiliang, LIU Peng, LIU Jinlong, CHEN Liangxian, WEI Junjun, AN Kang, ZHENG Yuting, LI Chengming
无机材料学报
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2023, (12): 1413
-1419
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DOI: 10.15541/jim20230202
