基于等离子体诊断的MPCVD单晶金刚石生长优化设计
李一村, 郝晓斌, 代兵, 文东岳, 朱嘉琦, 耿方娟, 乐卫平, 林伟群
Optimization Design of MPCVD Single Crystal Diamond Growth Based on Plasma Diagnostics
LI Yicun, HAO Xiaobin, DAI Bing, WEN Dongyue, ZHU Jiaqi, GENG Fangjuan, YUE Weiping, LIN Weiqun
无机材料学报
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2023, (12): 1405
-1412
.
DOI: 10.15541/jim20230164
