半密封直拉法生长6英寸磷化铟单晶热场研究
史艳磊, 孙聂枫, 徐成彦, 王书杰, 林朋, 马春雷, 徐森锋, 王维, 陈春梅, 付莉杰, 邵会民, 李晓岚, 王阳, 秦敬凯
Thermal Field of 6-inch Indium Phosphide Single Crystal Growth by Semi-sealed Czochralski Method
SHI Yanlei, SUN Niefeng, XU Chengyan, WANG Shujie, LIN Peng, MA Chunlei, XU Senfeng, WANG Wei, CHEN Chunmei, FU Lijie, SHAO Huimin, LI Xiaolan, WANG Yang, QIN Jingkai
无机材料学报
.
2023, (3): 335
-342
.
DOI: 10.15541/jim20220645
