硅片上集成高介电调谐率的柱状纳米晶BaTiO<sub>3</sub>铁电薄膜

赵玉垚, 欧阳俊

Columnar Nanograined BaTiO₃ Ferroelectric Thin Films Integrated on Si with a Sizable Dielectric Tunability

ZHAO Yuyao, OUYANG Jun

无机材料学报 . 2022, (6): 596 -602 . DOI: 10.15541/jim20210437