4H-SiC外延层中堆垛层错与衬底缺陷的关联性研究
郭钰, 彭同华, 刘春俊, 杨占伟, 蔡振立
Correlation between Stacking Faults in Epitaxial Layers of 4H-SiC and Defects in 4H-SiC Substrate
GUO Yu, PENG Tong-Hua, LIU Chun-Jun, YANG Zhan-Wei, CAI Zhen-Li
无机材料学报
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2019, (7): 748
-754
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DOI: 10.15541/jim20180443
