SiO2纳米球的粒径均一性研究及其在硅光学共振纳米柱阵列中的应用
彭新村, 王智栋, 曾梦丝, 刘云, 邹继军, 朱志甫, 邓文娟
Improvement on Size Uniformity of SiO2 Nanospheres Applied in Si Optical Resonance Nanopillar-arrays
PENG Xin-Cun, WANG Zhi-Dong, ZENG Meng-Si, LIU Yun, ZOU Ji-Jun, ZHU Zhi-Fu, DENG Wen-Juan
无机材料学报
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2019, (7): 734
-740
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DOI: 10.15541/jim20180440
