多层介质膜脉宽压缩光栅清洗方法研究
邹溪, 晋云霞, 孔钒宇, 王勇禄, 张益彬, 邵建达
Cleaning Methods for Multilayer Dielectric Pulse Compression Gratings
ZOU Xi, JIN Yun-Xia, KONG Fan-Yu, WANG Yong-Lu, ZHANG Yi-Bin, SHAO Jian-Da
无机材料学报
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2019, (12): 1285
-1289
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DOI: 10.15541/jim20190054
