低温反应溅射Al+α-Al2O3复合靶沉积α-Al2O3薄膜
程奕天, 邱万奇, 周克崧, 刘仲武, 焦东玲, 钟喜春, 张辉
Low-temperature Deposition of α-Al2O3 Films by Reactive Sputtering Al+α-Al2O3 Target
CHENG Yi-Tian, QIU Wan-Qi, ZHOU Ke-Song, LIU Zhong-Wu, JIAO Dong-Ling, ZHONG Xi-Chun, ZHANG Hui
无机材料学报
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2019, (8): 862
-866
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DOI: 10.15541/jim20180473
