沉积温度及热处理对低压化学气相沉积氮化硅涂层的影响
廖春景, 董绍明, 靳喜海, 胡建宝, 张翔宇, 吴惠霞
Deposition Temperature and Heat Treatment on Silicon Nitride Coating Deposited by LPCVD
LIAO Chun-Jing, DONG Shao-Ming, JIN Xi-Hai, HU Jian-Bao, ZHANG Xiang-Yu, WU Hui-Xia
无机材料学报
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2019, (11): 1231
-1237
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DOI: 10.15541/jim20190035
