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无机材料学报
掠射角溅射沉积纳米结构氧化钨薄膜
王美涵, 温佳星, 陈昀, 雷浩
Nano-structured WO3 Thin Films Deposited by Glancing Angle Magnetron Sputtering
WANG Mei-Han, WEN Jia-Xing, CHEN Yun, LEI Hao
无机材料学报 . 2018, (12): 1303 -1308 .  DOI: 10.15541/jim20180130