NH3/HTMS气相法改性SiO2增透膜的耐环境稳定性
赵慧月, 王晓栋, 冯建斌, 刘源, 黄吉辰, 沈军
Environmental Stable SiO2 Antireflective Coating Modified via NH3/HTMS Vapor Phase Treatment
ZHAO Hui-Yue, WANG Xiao-Dong, FENG Jian-Bin, LIU Yuan, HUANG Ji-Chen, SHEN Jun
无机材料学报
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2018, (11): 1219
-1224
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DOI: 10.15541/jim20180033
