BCl3-NH3-H2-N2前驱体化学气相沉积法制备氮化硼涂层
王梦千, 贾林涛, 李爱军, 彭雨晴, 张方舟
Preparation of Boron Nitride Coating from BCl3-NH3-H2-N2 Precursor by Chemical Vapor Deposition
WANG Meng-Qian, JIA Lin-Tao, LI Ai-Jun, PENG Yu-Qing, ZHANG Fang-Zhou
无机材料学报
.
2018, (11): 1179
-1185
.
DOI: 10.15541/jim20180021
