基于Al2O3介质的Ga2O3 MOSFET器件制备研究
吕元杰, 宋旭波, 何泽召, 谭鑫, 周幸叶, 王元刚, 顾国栋, 冯志红
Ga2O3 MOSFET Device with Al2O3 Gate Dielectric
LV Yuan-Jie, SONG Xu-Bo, HE Ze-Zhao, TAN Xin, ZHOU Xing-Ye, WANG Yuan-Gang, GU Guo-Dong, FENG Zhi-Hong
无机材料学报
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2018, (9): 976
-980
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DOI: 10.15541/jim20170528
