氢气氛退火对硅上低温外延制备的硅锗薄膜性能的影响
王 锦, 陶 科, 李国峰, 梁 科, 蔡宏琨
Effect of Hydrogen Annealing on the Property of Low-temperature Epitaxial Growth of Sige Thin Films on Si Substrate
WANG Jin, TAO Ke, LI Guo-Feng, LIANG Ke, CAI Hong-Kun
无机材料学报
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2017, (2): 191
-196
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DOI: 10.15541/jim20160247
