四步法制备高质量硅基砷化镓薄膜
刘广政, 徐 波, 叶晓玲, 刘峰奇, 王占国
Four-step Method for Growing High-quality GaAs Films on Si Substrate by Molecular Beam Epitaxy
LIU Guang-Zheng, XU Bo, YE Xiao-Ling, LIU Feng-Qi, WANG Zhan-Guo
无机材料学报
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2016, (11): 1263
-1268
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DOI: 10.15541/jim20160120
