原子层沉积工艺制备催化薄膜厚度对生长碳纳米管阵列的影响
杨 超, 李 莹, 闫 璐, 曹韫真
Influence of Catalyst Film Thickness Deposited by Atomic Layer Deposition on Growth of Aligned Carbon Nanotubes
YANG Chao, LI Ying, YAN Lu, CAO Yun-Zhen
无机材料学报
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2016, (7): 681
-686
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DOI: 10.15541/jim20150594
