应用等离子体辉光监控反馈控制反应气体流量制备VO2 薄膜的研究
王 孝, 闫 璐, 李 莹, 曹韫真
Sputtering Deposition of VO2 Film Using Plasma Emission Monitor as Reactive Gas Flow Rate Feedback Control
WANG Xiao, YAN Lu, LI Ying, CAO Yun-Zhen
无机材料学报
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2015, (11): 1228
-1232
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DOI: 10.15541/jim20150302
