高分辨X射线衍射表征氮化镓外延层缺陷密度

崔潆心, 徐明升, 徐现刚, 胡小波

High Resolution X-ray Diffraction Analysis of Defect Density of Gallium Nitride Epitaxial Layer

CUI Ying-Xin, XU Ming-Sheng, XU Xian-Gang, HU Xiao-Bo

无机材料学报 . 2015, (10): 1094 -1098 . DOI: 10.15541/jim20150069