扫描透射电子显微镜(STEM)在新一代高K栅介质材料的应用
朱信华, 李爱东, 刘治国
Applications of Scanning Transmission Electron Microscopy (STEM) in the New Generation of High-K Gate Dielectrics
ZHU Xin-Hua, LI Ai-Dong, LIU Zhi-Guo
无机材料学报
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2014, (12): 1233
-1240
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DOI: 10.15541/jim20140110
