原子层沉积技术合成氧化铝薄膜包覆二硝酰胺铵
龚 婷, 秦利军, 严 蕊, 胡 岚, 姬月萍, 冯 昊
Alumina Thin Film Coated Ammonium Dinitramide Fabricated by
Atomic Layer Deposition
GONG Ting, QIN Li-Jun, YAN Rui, HU Lan, JI Yue-Ping, FENG Hao
无机材料学报
.
2014, (8): 869
-874
.
DOI: 10.15541/jim20130572
