PECVD沉积和原位退火时间对h-BN薄膜组成及光学带隙的影响
秦 毅, 赵 婷, 王 波, 杨建锋
Influence of Deposition and in situ Annealing Time on Composition and Optical Band Gap of h-BN Films Deposited by PECVD
QIN Yi, ZHAO Ting, WANG Bo, YANG Jian-Feng
无机材料学报
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2014, (7): 729
-734
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DOI: 10.3724/SP.J.1077.2014.13549
