氢气与Cu中间层对GZO薄膜光电性能的影响
吕 坤, 祝柏林, 李 珂, 胡文超, 谢 铭, 吴 隽
Effect of Hydrogen and Cu Interlayer on the Optical and Electrical Properties of GZO Thin Film
LV Kun, ZHU Bai-Lin, LI Ke, HU Wen-Chao, XIE Ming, WU Jun
无机材料学报
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2014, (5): 493
-497
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DOI: 10.3724/SP.J.1077.2014.13396