离轴磁控溅射法生长1-3维PZT-NFO纳米复合薄膜
张 辉, 马永军, 王艺程, 文丹丹, 叶 飞, 白飞明
Preparation of 1-3 Dimensional PZT-NFO Nanocomposite Films by Off-axis Magnetron Sputtering
ZHANG Hui, MA Yong-Jun, WANG Yi-Cheng, WEN Dan-Dan, YE Fei, BAI Fei-Ming
无机材料学报
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2014, (4): 371
-376
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DOI: 10.3724/SP.J.1077.2013.13363
