采用水基原子层沉积工艺在石墨烯上沉积Al2O3介质薄膜研究
张有为, 万 里, 程新红, 王中健, 夏 超, 曹 铎, 贾婷婷, 俞跃辉
Studies on H2O-based Atomic Layer Deposition of Al2O3 Dielectric on Pristine Graphene
ZHANG You-Wei, WAN Li, CHENG Xin-Hong, WANG Zhong-Jian, XIA Chao, CAO Duo, JIA Ting-Ting, YU Yue-Hui
无机材料学报
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2012, (9): 956
-960
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DOI: 10.3724/SP.J.1077.2012.11663
