靶成分和溅射参数对碳化钒薄膜微结构与力学性能的影响
沈 洁, 李冠群, 李玉阁, 李戈扬
Effect of Target Composition and Sputtering Parameters on Microstructure and Mechanical Properties of Vanadium Carbide Films
SHEN Jie, LI Guan-Qun, LI Yu-Ge, LI Ge-Yang
无机材料学报
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2012, (5): 536
-540
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DOI: 10.3724/SP.J.1077.2012.00536
