基底温度对直流溅射Nb掺杂TiO2薄膜性能的影响
黄 帅, 李晨辉, 孙宜华, 柯文明
Influence of the Substrate Temperature on the Properties of Nb-doped TiO2 Films Deposited by DC Magnetron Sputtering
HUANG Shuai, LI Chen-Hui, SUN Yi-Hua, KE Wen-Ming
无机材料学报
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2012, (1): 64
-68
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DOI: 10.3724/SP.J.1077.2012.00064
