气溶胶辅助化学气相沉积制备Al掺杂ZnO透明导电薄膜
秦秀娟, 韩司慧智, 赵 琳, 左华通, 宋士涛
Fabrication of Transparent Conductive Al-doped ZnO Thin Films by Aerosol-assisted Chemical Vapour Deposition
QIN Xiu-Juan, HAN Si-Hui-Zhi, ZHAO Lin, ZUO Hua-Tong, SONG Shi-Tao
无机材料学报
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2011, (6): 607
-612
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DOI: 10.3724/SP.J.1077.2011.00607
