高温退火对反应溅射制备的a-SiC:H薄膜结构的影响

王印月,王辉耀,王吉政,郭永平,陈光华

Effect of High-Temperature Annealing on the Structure of Reactive-Sputtering a-SiC:H Films

WANG Yinyue,WANG Huiyao,WANG Jizheng,GUO Yongping,CHEN Guanghua

无机材料学报 . 1997, (3): 351 -355 .