MOD制备的PZT薄膜的相结构发展和成分分析

包定华,吴小清,张良莹,姚熹

Phase Structure Development and Composition Analysis of PZT Thin Films Prepared by Metallo-organic Decomposition

BAO Ding-Hua,WU Xiao-Qing,ZHANG Liang-Ying,YAO Xi

无机材料学报 . 1999, (1): 119 -126 .