磁过滤阴极弧制备四面体非晶碳膜热稳定性研究
覃礼钊,张旭,吴正龙,刘安东,廖斌
largeThermal Stability of Tetrahedral Amorphous Carbon Films Fabricated by Filtered Cathodic Arc Technique
QIN Li-Zhao,ZHANG Xu,WU Zheng-Long,LIU An-Dong,LIAO Bin
无机材料学报
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2008, (4): 789
-793
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DOI: 10.3724/SP.J.1077.2008.00789
