激光致溅射沉积Ge2Sb2Te5薄膜的结晶行为研究
刘波,阮昊,干福熹
Laser-induced Crystallization Behavior of the Sputtered Ge2Sb2Te5 Film
LIU Bo,RUAN Hao,GAN Fu-Xi
无机材料学报 . 2002, (3): 637 -640 .