Si基多孔SiO<SUB>2</SUB>薄膜的驻极体性能

张晓青,Wedel A,Buechtemann A,夏钟福,张冶文

Electret Characteristics of the Porous SiO₂ Thin Film Based on Si Substrate

ZHANG XianQing,Wedel A,Buechtemann A,XIA Zhong-Fu,ZHANG Ye-Wen

无机材料学报 . 2001, (3): 491 -496 .