大尺寸6H-SiC半导体单晶材料的生长
陈之战,肖兵,施尔畏,庄击勇,刘先才
Growth of Large 6H-SiC Single Crystals
CHEN Zhi-Zhan,XIAO Bing,SHI Er-Wei,ZHUANG Ji-Yong,LIU Xian-Cai
无机材料学报 . 2002, (4): 685 -690 .