沉积条件对CVD-SiC沉积热力学与形貌的影响

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Effects of Deposition Conditions on Deposition Thermodynamics and Morphology of CVD-SiC

XIAO Peng,XU Yong-Dong,HUANG Bai-Yun

无机材料学报 . 2002, (4): 877 -881 .