等离子体基脉冲偏压沉积DLC膜的氢分布和氢含量

夏立芳,孙明仁

Distribution and Content of Hydrogen in DLC Films Prepared by Plasma Based Pulsed Bias Deposition

XIA Li-Fang,SUN Ming-Ren

无机材料学报 . 2002, (4): 777 -781 .