直接氮化法制备纳米晶TiN薄膜
姜洪波,高濂,李景国
Preparation of Nanocrystalline TiN Film by Direct Nitridation of TiO2 Film
JIANG Hong-Bo,GAO Lian,LI Jing-Guo
无机材料学报 . 2003, (2): 495 -499 .