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2007 , Vol. 22 >Issue 3: 565 - 569

DOI: https://doi.org/10.3724/SP.J.1077.2007.00565

研究论文

非晶金刚石薄膜对温度的敏感性研究

  • 朱嘉琦 ,
  • 孟松鹤 ,
  • 陈旺寿 ,
  • 韩杰才
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  • 哈尔滨工业大学复合材料与结构研究所 哈尔滨 150080

收稿日期: 2006-06-25

  修回日期: 2006-07-19

  网络出版日期: 2007-05-20

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Temperature-dependent Microstructural Properties of Amorphous Diamond Films

  • ZHU Jia-Qi ,
  • MENG Song-He ,
  • CHEN Wang-Shou ,
  • HAN Jie-Cai
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  • Center for Composite Materials, Harbin Institute of Technology, Harbin 150080, China

Received date: 2006-06-25

  Revised date: 2006-07-19

  Online published: 2007-05-20

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摘要

采用过滤阴极真空电弧技术制备非晶金刚石薄膜, 在-190～600℃范围研究非晶金刚石薄膜的温度敏感性. 利用液氮泵在Linkam试验台上冷却样品并实时采样, 通过炉中退火实现样品加热. 分别测试可见光拉曼光谱和纳米压痕, 研究薄膜的微结构和机械性能的变化. 实验表明: 过滤阴极真空电弧制备的非晶金刚石薄膜具有较好的热稳定性. 在空气中退火到400℃, 其硬度和弹性模量基本保持不变, 其结构可以一直稳定到500℃, 但是到600℃, 薄膜因为氧化作用而快速消耗. 非晶金刚石薄膜的可见光拉曼光谱显示随着温度的升高, 谱峰峰位向高频偏移. 在低温冷却过程中, 薄膜对温度变化不敏感, 其结构保持不变.

关键词： 非晶金刚石; 过滤阴极真空电弧; 温度敏感性; 拉曼光谱

本文引用格式

朱嘉琦 , 孟松鹤 , 陈旺寿 , 韩杰才 . 非晶金刚石薄膜对温度的敏感性研究[J]. 无机材料学报, 2007 , 22(3) : 565 -569 . DOI: 10.3724/SP.J.1077.2007.00565

Abstract

The temperature sensibility of amorphous diamond (a-D) films deposited with the filtered cathodic vacuum arc technology was investigated in the range of -190-600℃. The samples cooled by liquid nitrogen pump were $in~situ$ measured on a Linkam stage and the samples for thermal stability were heated in a furnace. The microstructure and mechanical properties were respectively examined by visible Raman spectroscopy and a nanoindenter. The results show that a-D films have better thermal stability in air, they can hold their hardness up to 400℃ and hold their structure up to 500℃. However, the complete material loss takes place at about 600℃. Raman measurements show an apparent shift of the G-peak frequency to higher values with increasing annealing temperatures. The films are not sensitive to lower temperatures. The microstucture of the films remains stable as temperatures are decreased to -190℃.

Key words： amorphous diamond; filtered cathodic vacuum arc; temperature sensibility; Raman spectroscopy

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