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2009 , Vol. 24 >Issue 4: 827 - 830

DOI: https://doi.org/10.3724/SP.J.1077.2009.00827

研究论文

真空气氛下非晶硅碳氮(SiCN)陶瓷的高温晶化行为

  • 夏 熠 ,
  • 乔生儒 ,
  • 王强强 ,
  • 张程煜 ,
  • 韩 栋 ,
  • 李 玫
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  • 西北工业大学 超高温结构复合材料实验室， 西安 710072

收稿日期: 2008-10-23

  修回日期: 2008-12-25

  网络出版日期: 2009-07-20

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Crystallization of Amorphous SiCN Ceramic Annealed in Vacuum

  • XIA Yi ,
  • QIAO Sheng-Ru ,
  • WANG Qiang-Qiang ,
  • ZHANG Cheng-Yu ,
  • HAN Dong ,
  • LI Mei
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  • National Key Laboratory of Thermostructure Composite Materials, Northwestern Polytechnical University, Xi’an 710072, China

Received date: 2008-10-23

  Revised date: 2008-12-25

  Online published: 2009-07-20

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摘要

以六甲基二硅氮烷为单一前驱体，采用电热裂解化学气相沉积技术制备了SiCN陶瓷. 借助X射线衍射仪、透射电子显微镜研究了真空环境中非晶SiCN陶瓷在1300～1900℃范围内的晶化行为，并根据研究结果，运用分解-结晶机理解释了其晶化过程. 非晶SiCN陶瓷在低于1300℃开始发生分解，形成富Si-C区域，并最终发生β-SiC结晶. 其结晶度随热处理温度的升高而愈加明显.在1700℃处理时发生β-SiC→α-SiC相变. 分解形成的N-难以与Si-结合形成富Si-N区域，最终以N2形式溢出，在整个热处理温度范围没有出现氮气下热处理时存在的Si3N4结晶.

关键词： 非晶SiCN陶瓷; 晶化行为; 相变; 显微结构

本文引用格式

夏 熠 , 乔生儒 , 王强强 , 张程煜 , 韩 栋 , 李 玫 . 真空气氛下非晶硅碳氮(SiCN)陶瓷的高温晶化行为[J]. 无机材料学报, 2009 , 24(4) : 827 -830 . DOI: 10.3724/SP.J.1077.2009.00827

Abstract

SiCN ceramic was fabricated by electro-thermal pyrolysis using hexamethyldisilazane as precursor. X-ray diffraction and transmission electron microscope were employed to study crystallization process of amorphous SiCN after annealing at temperature from 1700℃ to 1900℃ in vacuum. Decomposition-crystallization mechanism was used to characterize its crystallization process. Amorphous SiCN begin to decompose below 1300℃ in vacuum and Si-C-enriched districts are formed and then changes to form β-SiC crystal. Crystallinity degree increases as treated temperature rises. Phase transition from β-SiC to α-SiC occurs after annealing at 1700℃. The nitrogen is released in the form of N2 and Si3N4 crystal is not detected though it often exists in the SiCN annealed in N2 atmosphere.

Key words： amorphous SiCN; crystallization; phase transition; microstructure

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