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2006 , Vol. 21 >Issue 5: 1223 - 1229

DOI: https://doi.org/10.3724/SP.J.1077.2006.01223

研究论文

用于非制冷热释电红外探测器的 PZT铁电薄膜研究

  • 王忠华 ,
  • 李振豪 ,
  • 普朝光 ,
  • 杨培志 ,
  • 林猷慎
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  • 昆明物理研究所, 昆明 650223

收稿日期: 2005-09-14

  修回日期: 2005-11-15

  网络出版日期: 2006-09-20

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PZT Ferroelectric Thin Film for Uncooled Pyroelectric Infrared Detectors

  • WANG Zhong-Hua ,
  • LI Zhen-Hao ,
  • PU Chao-Guang ,
  • YANG Pei-Zhi ,
  • LIN You-Shen
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  • Kunming Institute of Physics, Kunming 650223, China

Received date: 2005-09-14

  Revised date: 2005-11-15

  Online published: 2006-09-20

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摘要

采用溶胶-凝胶和射频磁控溅射相结合的方法制备了PZT铁电薄膜. 用溶胶-凝胶法制备一层PZT薄膜作为籽晶层, 在衬底PZT(seed layer)/Pt/Ti/SiO2/Si上用射频磁控溅射过量10%Pb的Pb(ZrxTi1-x)O3(x=0.3)陶瓷靶生长厚500nm的PZT铁电薄膜. 采用在450℃预退火, 575℃后退火的快速分级退火方法对PZT铁电薄膜进行热处理. PZT铁电薄膜获得了较好的热释电性能, 热释电系数、介电常数、介电损耗和探测度优值因子分别为ρ=2.3×10-8C．cm-2·K-1, ε =500, tanδ =0.02, F d=0.94×10-5Pa-0.5.

关键词： 非制冷热释电红外探测器; PZT; 籽晶层; 快速分级退火

本文引用格式

王忠华 , 李振豪 , 普朝光 , 杨培志 , 林猷慎 . 用于非制冷热释电红外探测器的 PZT铁电薄膜研究[J]. 无机材料学报, 2006 , 21(5) : 1223 -1229 . DOI: 10.3724/SP.J.1077.2006.01223

Abstract

Lead zirconate titanate(PZT) ferroelectric thin films were prepared by both sol-gel and r.f. magnetron sputtering technologies. In order to decrease the crystallization temperature of thin films and improve the probabilities of nucleus, a PZT seed-layer was prepared by using the sol-gel method. The PZT ferroelectric thin films with about 500nm thickness were sputter-deposited from a Pb(ZrxTi1-x)O3(x=0.3) ceramic target containing 10% excess Pb on PZT(seed layer)/Pt/Ti/SiO2/Si substrates. The stepping-annealing with RTP (rapid theal process) was proposed for theal treatment of the PZT ferroelectric thin films. The PZT ferroelectric thin film showed good dielectric and pyroelectric properties
by pre-annealing at 450℃ for 5min and following post-annealing at 575℃ for 5min. The results of pyroelectric coefficient 2.3×10-8C·cm-2·K-1, relative dielectric constant 500, dielectric loss 0.02, detectivity figure of merit 0.94×10-5Pa-0.5 were obtained.

Key words： uncooled pyroelectric infrared detectors; lead zirconate titanate(PZT); seed layer; rapid stepping-annealing

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