利用自组装单层膜技术, 以三氯十八烷基硅烷（OTS）为模板, 以硝酸铋和硝酸铁为原料, 柠檬酸为络合剂, 在玻璃基片上制备了铁酸铋晶态薄膜. 探讨了薄膜的煅烧温度和沉积温度对BiFeO₃薄膜的影响. 通过X射线衍射（XRD）、扫描电镜（SEM）及原子力显微镜（AFM）测试手段对BiFeO₃薄膜的物相组成、显微结构和表面形貌进行了表征, EDS能谱测试为铁酸铋薄膜的化学组成提供了有力的证据. 结果表明：利用自组装技术在600℃热处理后成功制备出了纯净的BiFeO₃晶态薄膜, 当沉积温度为70～80℃时铁酸铋薄膜结晶良好, 样品表面均匀、致密.

Using OTS as the template, Bi(NO₃)₃ and Fe(NO₃)₃ as the raw material and citric acid as the complexing agent, BiFeO₃ crystalline film was prepared on the glass substrate by the selfassembled monolayer technique. Effects of calcination and deposition temperatures on the BiFeO₃ film were explored. The physical phase composition, the microstructure and surface morphology of BiFeO₃ film were characterized by the testing methods, such as XRD, SEM and AFM. The energy detecting spectrum (EDS) provided the supporting evidence for the chemical composition of BiFeO₃ film. The results show that the pure BiFeO₃ crystalline film is prepared by the self-assembled monolayer technique after calcined at 600℃. In the deposition temperature range from 70℃ to 80℃, the BiFeO₃ film has better crystallinity with the homogeneous and dense surface.