金属有机溶液法制备YBa2Cu3O7-δ超导薄膜的厚化特性

doi:10.15541/jim20140088

无机材料学报 ›› 2014, Vol. 29 ›› Issue (11): 1167-1172.DOI: 10.15541/jim20140088 CSTR: 32189.14.10.15541/jim20140088

金属有机溶液法制备YBa₂Cu₃O_7-δ超导薄膜的厚化特性

芮润生^{1, 2}, 刘志勇^{1, 2}, 白传易^{1, 2}, 郭艳群^{1, 2}, 金晓艳², 蔡传兵^{1, 2}

(1. 上海大学超导与应用技术研究中心, 上海200444; 2. 上海上创超导科技有限公司, 上海201401)

收稿日期:2014-02-28 修回日期:2014-04-11 出版日期:2014-11-20 网络出版日期:2014-10-24
作者简介:芮润生(1988–), 男, 硕士研究生. E-mail: ruirunsheng@126.com
基金资助:
上海科学技术委员会(13111102300,11dz1100302);国家自然科学基金(11174193,51202141);中国科学技术973项目(2011CBA00105)

Influence of Thickness on Performances of YBa₂Cu₃O_7-_δ Films Prepared by Metal Organic Solution Deposition

RUI Run-Sheng^{1, 2}, LIU Zhi-Yong^{1, 2}, BAI Chuang-Yi^{1, 2}, GUO Yan-Quen^{1, 2}, JIN Xiao-Yan², CAI Chuan-Bing^{1, 2}

(1. Research center for superconductors and applied technologies, Shanghai University, Shanghai 200444, China; 2. Shanghai Creative Superconductor Technologies Co., Ltd. Shanghai 201401, China)

Received:2014-02-28 Revised:2014-04-11 Published:2014-11-20 Online:2014-10-24
About author:RUI Run-Sheng. E-mail: ruirunsheng@126.com
Supported by:
Science and Technology Commission of Shanghai Municipality (13111102300,11dz1100302);National Natural Science Foundation of China (11174193,51202141);Ministry of Science and Technology of China 973 Projects (2011CBA00105)

摘要/Abstract

摘要：

三氟乙酸-金属有机沉积法(TFA-MOD)是YBa₂Cu₃O_7-δ(YBCO)涂层导体制备最有前景的技术路线之一。采用添加高沸点有机溶剂二乙醇胺(DEA)对TFA-MOD法进行调制改进, 抑制了缺陷形成, 并通过增加前驱液金属阳离子浓度提高了单次涂敷薄膜的厚度。研究表明: 低温热解膜厚度和前驱液粘度与前驱液中阳离子浓度的依赖关系均呈现幂指数关系; 选择合适的前驱液浓度和涂覆参数, 单次涂敷获得了较厚的薄膜, 厚度达到1.3 μm以上, 且表面平整无开裂, 微观结构总体均匀, 但厚膜表面出现弥散的异质相颗粒。超导临界电流密度的测量结果显示: 随着超导薄膜厚度的增加, 临界电流密度呈下降趋势, 而超导临界电流得到显著的提高, 如前驱液浓度为2.5 mol/L样品的临界电流I_c是前驱液浓度为1.0 mol/L样品的4.7倍。

关键词: TFA-MOD, YBCO厚膜, 快速制备, 二乙醇胺, 前驱液浓度

Abstract:

Trifluoroacetate metal organic deposition (TFA-MOD) is one of the most promising technology routes for fabrication of YBa₂Cu₃O_7-_δ (YBCO) coated conductors. In this paper, high-boiling point organic solvent diethanolamine (DEA) was added to modulate and to improve the properties of precursor solution by suppression the defect in the final films. And the thickness of single coated film was increased by increased concentration of the metal ions in the precursor solution. It is revealed that an exponential relationship was found between the thickness of precursor film after low-temperature decomposition and the ion concentration, as well as the viscosity of precursor solution vs the ion concentration. Optimizing the ion concentration and dip-coating parameters, smooth and crack-free YBCO films after crystallization are achieved with the thickness more than 1.3 μm. The films show homogeneous microstructures while dispersive heterogeneous particles appear in the surface of the thick films. Critical current density (J_c) measurement shows a decrease of J_c due to the increase of the thickness of YBCO films prepared by high concentration precursor solution, while critical currents (I_c) are distinctly improved. For instance, the I_c value of YBCO film prepared by 2.5 mol/L precursor solution is 4.7 times of that by 1.0 mol/L precursor solution.

Key words: TFA-MOD, YBCO thick films, rapid preparation, DEA, concentration of precursor solution

中图分类号:

TQ174

芮润生, 刘志勇, 白传易, 郭艳群, 金晓艳, 蔡传兵. 金属有机溶液法制备YBa₂Cu₃O_7-δ超导薄膜的厚化特性[J]. 无机材料学报, 2014, 29(11): 1167-1172.

RUI Run-Sheng, LIU Zhi-Yong, BAI Chuang-Yi, GUO Yan-Quen, JIN Xiao-Yan, CAI Chuan-Bing. Influence of Thickness on Performances of YBa₂Cu₃O_7-_δ Films Prepared by Metal Organic Solution Deposition[J]. Journal of Inorganic Materials, 2014, 29(11): 1167-1172.

图/表 8

图1 在Si片上以20 ℃/min的升温速度所制备的低温热解前驱膜的表面形貌

Fig. 1 Surface morphologies of precursor films prepared on Si slice at heating rate of 20℃/min Concentration of the precursor solution is (a) 1.0 mol/L, (b) 1.5 mol/L, (c) 2.0 mol/L and (d) 2.5 mol/L

图2 在Si片上以5℃/min的升温速度所制备的低温热解前驱膜的表面形貌

Fig. 2 Surface morphologies of precursor films prepared on Si slice at heating rate of 5 ℃/min Concentration of the precursor solution is (a) 1.0 mol/L, (b) 1.5 mol/L, (c) 2.0 mol/L and (d) 2.5 mol/L

图3 在LAO单晶上以20 ℃/min的升温速度所制备的不同厚度的YBCO样品的表面形貌

Fig. 3 Surface morphologies of different thickness of YBCO samples prepared on single LAO at heating rate of 20 ℃/min Concentration of the precursor solution is (a) 1.0 mol/L, (b) 1.5 mol/L, (c) 2.0 mol/L and (d) 2.5 mol/L

图4 在单晶LAO和Si片上的低温热解前驱薄膜的厚度和前驱液的粘度对前驱液浓度的依赖关系(a)和前驱液浓度为2.5 mol/L制备的低温前驱膜样品剖面的电子显微照片

Fig. 4 Concentration of the precursor solution dependences of thickness of precursor films prepared on single LAO or Si slice with viscosity of the precursor solution(a) and cross section image of precursor film prepared with the precursor solution’s concentration of 2.5 mol/L(b) Hollow circular: concentration of the precursor solution vs. thickness of precursor film on Si slice ( Half- hollow circular shown the phenomenon that films crack). Solid circular: concentration of the precursor solution vs. thickness of precursor film on single LAO. Hollow square: the viscosity vs concentration of the precursor solution

图5 YBCO样品的厚度随前驱液浓度的变化关系

Fig. 5 Concentration of the precursor solution dependences of thickness of YBCO samples

图6 (A)不同厚度的YBCO样品的XRD图谱, (B)YBCO样品的区域放大图谱

Fig. 6 θ-2θ scanning pattern of YBCO samples with different thicknesses (A) and enlarged θ-2θ scanning pattern (B) of YBCO samples Concentration of the precursor solution is (a) 1.0 mol/L, (b) 1.5 mol/L, (c) 2.0 mol/L, (d) 2.5 mol/L, respectively

图7 临界电流密度Jc与YBCO样品的峰强(003)和(006)的比值关系图

Fig. 7 Peak intensity ratio of (003) and (006) dependences of the critical current density Jc

图8 YBCO样品的临界电流密度Jc和Ic(n)/Ic(n=1.0mol/L)随YBCO厚度的变化关系(a)和感应电压与临界电流密度的关系(b)

Fig. 8 Thickness dependences of Jc and Ic(n)/Ic(n=1.0mol/L) (a) and induced voltage vs. Jc (b) of YBCO samples

参考文献 23

[1]	SELVAMANICKAM V, LEE H G, LI Y, et al. Fabrication of 100A class, 1m long coated conductor tapes by metal organic chemical vapor deposition and pulsed laser deposition. Physica C, 2003, 392-396(2): 859-862.
[2]	USOSKIN ALEXANDER, FREYHARDT HERBERT C. YBCO-coated conductors manufactured by high-rate pulsed laser deposition. MRS Bulletin, 2004, 29(8): 583-589.
[3]	CHEN JIA-JWEN, TAO BO-WAN, DENG XIN-WU, et al. Deposition of 3-inch double-sided YBCO high-Tc superconducting epitaxial thin films. Chinese Journal of Low Temperature Physics, 2003, 25(sl): 16-19.
[4]	MCINTYRE PAUL C, CIMA MICHAEL J, SMITH Jr JOHN A, et al. Effect of growth conditions on the properties and morphology of chemically derived epitaxial thin films of Ba2YCu3O7-x on (001) LaAlO3. J. Appl. Phys., 1992, 71(4): 1868-1877.
[5]	ZHAO YUE, SUO HONG-LI, GRIVEL JEAN-CLAUDE, et al. Study on CexLa1-xO2 buffer layer used in coated conductors by chemical solution method. Journal of Inorganic Materials, 2009, 24(6): 1201-1204.
[6]	GU HONG-WEI, YANG JIAN, LIU HUI-ZHOU, et al. Study on YBCO superconducting tape of 10 m in length. Science & Technology Review, 2008, 26(1): 32-37.
[7]	LIU MIN, SUO HONG-LI, ZHAO YUE, et al. Improvement of YBCO film properties by two-step deposition using spray pyrolysis method. Journal of Inorganic Materials, 2007, 22(2): 377-380.
[8]	GOYAL A, PARANTHAMAN M P, SCHOOP U. The RABiTS approach: using rolling-assisted biaxially textured substrates for high-performance YBCO superconductors. Materials Research Society, 2004, 29(8): 552-561.
[9]	FOLTYN SR, WANG H, CIVALE L, et al. Overcoming the barrier to 1000 A/cm width superconducting coatings. Applied Physics Letters, 2005, 87(16): 162505-1-3.
[10]	JANG SEOK HERN, LIM JUN HYUNG, LEE JIN SUNG, et al. Effects of heat treatment and film thickness on microstructure and critical properties of YBCO film processed by TFA-MOD. Physica C, 2007, 451(2): 118-126.
[11]	JANG S H, LIM J H, LEE S Y, et al. Structural characterization of multi-coated YBCO films processed by metal-organic deposition method. Physica C, 2008, 468(15-20): 1666-1669.
[12]	CHO E A, JANG G E, HYUN O B. Multi-coated YBa2Cu3O7-x films fabricated by a fluorine-free Sol-Gel process. Journal of Magnetics, 2011, 16(2): 186-191.
[13]	TANG XIAO, SUO HONG-LI, YE SHUAI, et al. Rapid synthesis of YBCO thick superconducting films by low fluorine TFA-MOD method. Journal of Inorganic Materials, 2010, 25(9): 971-974.
[14]	SOLOVYOV VYACHESLAY F, WIESMANN HAROLD J, WU LI-JUN, et al. High rate deposition of 5 μm thick YBa2Cu3O7 films using the BaF2 ex-situ post annealing process. IEEE Transactions on Applied Superconductivity, 1999, 9(2): 1467-1470.
[15]	ARAKI TAKESHI, HAYASHI MARIKO, FUKE HIROYUKI. Growth mechanism during firing process of single-coated thick YBCO films by TFA-MOD. IEEE Transactions on Applied Superconductivity, 2013, 23(3): 6603105.
[16]	DAWLEY J T, CLEM P G, BOYLE T J, et al. Rapid processing method for solution deposited YBa2Cu3O7-δ thin film. Physica C, 2004, 402(1/2): 143-151.
[17]	ZENG LIN, HAO WEN-JIA, BAI CHUAN-YI, et al. The variations of internal residual stress and critical current induced by thickness of YBa2Cu3O7-δ film. Chinese Journal of Low Temperature Physics, 2012, 34(5): 321-326.
[18]	XIONG JIE, QIN WEN-FENG, CUI XU-MEI, et al. High-resol-ution XRD study of stress-modulated YBCO films with various thicknesses. Journal of Crystal Growth, 2007, 300(2): 364-367.
[19]	ROTHMAN S J, ROUTBORT J L, BAKER J E. Tracer diffusion of oxygen in YBa2Cu3O7-δ. Physical Review B, 1989, 40(13): 8852-8860.
[20]	ROTHMAN S J, ROUTBORT J L, WELP U. Anisotropy of oxygen tracer diffusion in single-crystal YBa2Cu3O7-δ. Physical Review B, 1991, 44(5): 2326-2333.
[21]	BAGARINAO K DEVELOS, YAMASAKI H, NAKAGAWA Y. Thickness dependence of Jc for YBCO thin films prepared by large-area pulsed laser deposition on CeO2-buffered sapphire substrates. Superconductor Science and Technology, 2005, 18(5): 667-674.
[22]	YAN WU-WEI, ZHANG CHENG-XIAO, WANG PENG-FEI, et al. Rapid preparation of YBCO superconductive film by chemical solution deposition. Chinese Journal of Low Temperature Physics, 2011, 33(5): 342-346.
[23]	MATSUI H, TSUKADA K, TSUCHIYA T, et al. Reduced crystallization time of YBCO in a fluorine-free MOD process using UV-lamp irradiation. Physica C, 2011, 471(21/22): 960-962.

金属有机溶液法制备YBa₂Cu₃O_7-δ超导薄膜的厚化特性

Influence of Thickness on Performances of YBa₂Cu₃O_7-_δ Films Prepared by Metal Organic Solution Deposition

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