具有SAF结构的IrMn基自旋阀材料的磁场退火研究

doi:10.3724/SP.J.1077.2014.13327

无机材料学报 ›› 2014, Vol. 29 ›› Issue (4): 411-416.DOI: 10.3724/SP.J.1077.2014.13327 CSTR: 32189.14.SP.J.1077.2014.13327

具有SAF结构的IrMn基自旋阀材料的磁场退火研究

李健平^1,2, 钱正洪^1,2, 孙宇澄^1,2, 白茹², 刘建林², 朱建国¹

(1. 四川大学材料科学与工程学院, 成都 610065; 2. 杭州电子科技大学磁电子中心, 杭州 310018)

收稿日期:2013-06-25 修回日期:2013-07-21 出版日期:2014-04-20 网络出版日期:2014-03-24
作者简介:李健平(1986-), 男, 博士研究生. E-mail:hero-ljp@163.com
基金资助:
科技部973子课题(2011CBA00602); 浙江省重大科技专项(2011C11047); 浙江省教育厅“磁电子材料和器件”创新团队(2009[171])

Effect of Magnetic Annealing on IrMn Based Spin Valve Materials with SAF Structure

Li Jian-Ping^1,2, QIAN Zheng-Hong^1,2, SUN Yu-Cheng^1,2, BAI Ru², LIU Jian-Lin², ZHU Jian-Guo¹

(1. College of Materials Science and Engineering, Sichuan University, Chengdu 610065, China; 2. Center for Integrated Spintronic Devices, Hangzhou Dianzi University, Hangzhou 310018, China)

Received:2013-06-25 Revised:2013-07-21 Published:2014-04-20 Online:2014-03-24
About author:Li Jian-Ping. E-mail:hero-ljp@163.com
Supported by:
National Program on Key Basic Research Project(2011CBA00602); Major Science and Technology Special Theme of Zheiiand Province (2011c2011c11047); Innovation Research Team for Spintronic Materials and Derices of Zheiang Province (2009[171])

摘要/Abstract

摘要： 用磁控溅射法制备了被钉扎层为反铁磁(SAF)结构(CoFe/Ru/CoFe)的IrMn基顶钉扎自旋阀材料, 分别采用HRTEM、AFM、XPS对材料的结构和成分进行表征。首先, 制备的自旋阀材料分别在200℃、245℃、255℃、265℃的真空条件(＜10^-5 Pa)下退火4 h, 发现经265℃退火, 自旋阀材料会发生明显的层间扩散, 从而引起磁电阻率的降低。在选择合适退火温度(245℃)的基础上, 研究了退火磁场对自旋阀材料磁电阻率的影响。在245℃的真空环境下, 沿着材料的钉扎方向分别施加大小为80、160、240、400、560 kA/m的磁场退火4 h。实验发现经过80和160 kA/m的磁场退火后, 材料的磁电阻率由退火前的8.80%分别下降到5.87%和6.31%; 经240 kA/m的磁场退火后材料的磁电阻率变为7.91%; 经400 kA/m的磁场退火后磁电阻率增大到9.89%; 经560 kA/m的磁场退火后磁电阻率进一步增大到10.79%, 比退火前增加了22.6%。

关键词: SAF, 自旋阀, 磁场退火

Abstract: IrMn based spin valve materials with SAF (CoFe/Ru/CoFe) structure were deposited by magnetron sputtering system. HRTEM, AFM and XPS techniques were utilized to characterize the microstructures and composition of the spin valve materials. First, the deposited materials were annealed at 200℃, 245℃, 255℃ and 265℃ for 4 h in vacuum (＜10^-5 Pa). It was found that obvious interlayer diffusion was happened after being annealed at 265℃, which resulted in the decrease of magneto-resistance (MR) ratio. Set field annealing temperature at 245℃, the spin valve materials were annealed at fields of 80, 160, 240, 400 and 560 kA/m along the pinning direction for 4 h in vacuum, respectively. It was found that the MR ratio of the materials declined to 5.87% and 6.31% from 8.80% after 80 kA/m and 160 kA/m annealing, respectively. After 240 kA/m annealing, the MR ratio became 7.91%. After 400 kA/m annealing, the MR ratio increased to 9.89%. After 560 kA/m annealing, the MR ratio reached 10.79%, which was increased by 22.6% as compared with the material before annealing.

Key words: SAF, spin valve, magnetic annealing

中图分类号:

TQ174

李健平, 钱正洪, 孙宇澄, 白茹, 刘建林, 朱建国. 具有SAF结构的IrMn基自旋阀材料的磁场退火研究[J]. 无机材料学报, 2014, 29(4): 411-416.

Li Jian-Ping, QIAN Zheng-Hong, SUN Yu-Cheng, BAI Ru, LIU Jian-Lin, ZHU Jian-Guo. Effect of Magnetic Annealing on IrMn Based Spin Valve Materials with SAF Structure[J]. Journal of Inorganic Materials, 2014, 29(4): 411-416.

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具有SAF结构的IrMn基自旋阀材料的磁场退火研究

Effect of Magnetic Annealing on IrMn Based Spin Valve Materials with SAF Structure

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