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无机材料学报

无机材料学报

• 研究论文 • 上一篇    

扫描电声显微镜中干扰信号及假信号的预防

张冰阳, 江福明, 杨 阳, 惠森兴, 姚 烈, 殷庆瑞   

  1. 中国科学院上海硅酸盐研究所无机功能材料开放实验室 上海 200050
  • 收稿日期:1996-04-03 修回日期:1996-04-22 出版日期:1997-08-20 网络出版日期:1997-08-20

Prevention of disturbed and False Signals in Scanning Electron Acoustic Microscope

ZHANG Bingyang, JIANG Fuming, YANG Yang, HUI Senxing, YAO Lie, YIN Qingrui   

  1. Laboratory of Functional Inorganic Materials, Shanghai Institute of Ceramics, Chinese Academy of Sciences Shanghai 200050 China
  • Received:1996-04-03 Revised:1996-04-22 Published:1997-08-20 Online:1997-08-20

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摘要： 本文对扫描电声显微镜电声成像中出现的干扰信号以及假?信号的产生进行了讨论. 指出扫描电声显微镜设备周围存在的高强度电场、磁?场、高频设备和仪器本身的接地是造成干扰信号出现的主要原因, 同时给出了一种能有效防止以上干扰的样品---探测器组件结构. 而在电声像中假信号产生?的原因则主要是由于样品和探测器接地不当所引起. 在进行电声成像观察和记?录时最好关掉电镜的对比度旋钮.

关键词: 干扰信号, 假信号, 扫描电声显微镜

Abstract: The effects of disturbed and false signals on Scanning Electron Acoustic Microscope (SEAM) are presented in this paper. Various reasons such as high electric fields, magnetic fields and high frequency instruments causing the disturbed signals on SEAM are discussed and a sample of detection assembly is give out, simultaneously. Emergence of false signals in SEAM is also analyzed on the bases of the upper surface of the sample earthed and the sample-transducer interface unearthed, the upper surface of the transducer earthed and the surface of the sample unearthed, and with both the upper surface of the sample and the transducer earthed. It would be best that the contrast switch is turned off when electron acoustic images are observed and imaged.

Key words: disturbed signal, false signal, scanning electron acoustic microscope (SEAM)