氧化锆基氧传感器对抽气(空气)系统的低真空测量

无机材料学报

氧化锆基氧传感器对抽气(空气)系统的低真空测量

孙成文; 陈深; 杨芝洲

中国科学院上海硅酸盐研究所; 上海 200050

收稿日期:1998-11-30 修回日期:1999-02-10 出版日期:1999-12-20 网络出版日期:1999-12-20

Low Vacuum Measurement of Zirconia-Based Oxygen Sensor for an Evacuated (Air) System

SUN Cheng-Wen; CHEN Shen; YANG Zhi-Zhou

Shanghai Institute of Ceramics; Chinese Academy of Sciences; Shanghai 200050; China

Received:1998-11-30 Revised:1999-02-10 Published:1999-12-20 Online:1999-12-20

摘要/Abstract

摘要： 应用Y₂O₃稳定ZrO₂氧浓差电池，在600～800℃测定了抽气（空气）系统（0．1～10－3MPa）中氧对大气氧的浓差电动势．实验得出，电池电动势E与被抽真空系统残余气压p的对数有线性关系：E＝RT／4F1n（p_air／p），线性方程斜率和理论值RT／4F接近，误差≤5％．测量电动势灵敏度随压力降低而增加，因此适宜用于低真空测量．

关键词: 低真空测量, 氧化钇稳定氧化锆, 氧化锆氧传感器, 氧化锆氧浓差电池

Abstract: The cell EMFs of oxygen in an evacuated (air) system (10⁵～10³Pa) versus atmospheric oxygen were measured from 600℃　to 800℃ by an
oxygen concentration cell with a solid electrolyte of yttria stabilized zirconia. The experimental results showed that there is a linear relationship between the cell
EMF and the logarithm of residual atmospheric pressure p in an evacuated (air) system. The produced EMF is given by the eqution E=(RT/4F)ln(p_air/p),
in which it’s slope is close to theoretic value and error less than 5%. The sensibility of measured EMF increases with the pressure decrease and may be suitable for low
vacuum measurement.

Key words: low vacuum measurement, yttria stabilized zirconia, zirconia oxygen sensor, zirconia oxygen concentration cell

中图分类号:

TB771

孙成文,陈深,杨芝洲. 氧化锆基氧传感器对抽气(空气)系统的低真空测量[J]. 无机材料学报.

SUN Cheng-Wen,CHEN Shen,YANG Zhi-Zhou. Low Vacuum Measurement of Zirconia-Based Oxygen Sensor for an Evacuated (Air) System[J]. Journal of Inorganic Materials.