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无机材料学报

无机材料学报

• 研究论文 • 上一篇    下一篇

热丝辅助ECR CVD制备cBN薄膜

张生俊; 陈光华   

  1. 北京工业大学材料学院新型功能材料教育部重点实验室 北京 100022
  • 收稿日期:2002-05-08 修回日期:2002-07-04 出版日期:2003-07-20 网络出版日期:2003-07-20

Fabrication of Cubic Boron Nitride Films by Electron Cyclotron Resonance CVD Assisted with Hot Filament

ZHANG Sheng-Jun; CHEN Guang-Hua   

  1. School of Materials Sciences & Engineering; Beijing Polytechnic University; The Key Laboratory of Advanced Functional Materials Ministry of .Education China; Beijng 100022; China
  • Received:2002-05-08 Revised:2002-07-04 Published:2003-07-20 Online:2003-07-20

PDF (PC)

979

被引次数

10

摘要： 立方氮化硼(cBN)是一种具有广泛应用价值的Ⅲ-Ⅴ族二元化合物,其优异性质可与金刚石相比拟或胜之。立方氮化硼的制备与性能研究是近二十年来材料领域关注的焦点之一。我们用热丝辅助ECR CVD方法制备了cBN薄膜,并初步探讨了热丝对cBN形成的作用。偏压并不是cBN形成的唯一主要条件,活性粒子也有非常关键的作用。

关键词: cBN, ECR CVD, 热丝

Abstract: Cubic boron nitride (cBN) is an important compound of the Ⅲ-Ⅴ group. It attracts much interest for years around the world due to its excellent
properties which are similar to or prior to those of diamond. The fabrication and properties investigation of cBN is one of the attractions
to materials researches for decades. In this paper, the fabrication of cBN films by ECR CVD technique assisted with a hot filament was reported.
The results show that negative bias is not the unique factor for formation of cBN, the active particles is also an essential factor.

Key words: cBN, ECR CVD, hot filament

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